JVC-7
7th JOINT VACUUM CONFERENCE
of
Hungary, Austria, Croatia and Slovenia
May 2629, 1997
Debrecen, Hungary
Final Programme
IUVSTA Highlights Seminars
Scientific Sessions
Exhibition
Sponsored by
IUVSTA, International Union for
Vacuum Science, Technique and Applications
OMFB, National Committee for Technological Development, Hungary
MTA, Hungarian Academy of Sciences
OTP, National Savings and Commercial Bank Ltd., Hajdú-Bihar
County, Hungary
PFEIFFER Vacuum Austria GmbH, Austria
CABURN-MDC Ltd., UK
LEYBOLD Vakuum GmbH, Germany
Organized by
Roland Eötvös Physical
Society (Hungary)
Hungarian National Committee of IUVSTA
Austrian Vacuum Society
Croatian Vacuum Society
Slovenian Vacuum Society
Hosted by
Institute of Nuclear Research of
the Hungarian Academy of Sciences (ATOMKI)
Debrecen Regional Center of the Hungarian Academy of Sciences (DAB)
Kossuth L. University Debrecen (KLTE)
Honorary chairman
Dénes Berényi, President of DAB
Scientific Programme Committee
József Gyulai (Budapest) chairman
Sándor Bohátka (Debrecen), Rudolph Dobrozemsky (Seibersdorf), Branko Gumhalter (Zagreb), Monika Jenko (Ljubljana), György Radnóczi (Budapest), Herbert Störi (Vienna), Anton Zalar (Ljubljana), Hrvoje Zorc (Zagreb)
Organising Committee
Sándor Bohátka (Debrecen) chairman
Dezsõ Beke (Debrecen), Joze Gasperic (Ljubljana), Wolfgang Husinsky (Vienna), László Kövér (Debrecen), Gábor Langer (Debrecen), Manfred Leisch (Graz), Imre Mojzes (Budapest), Andrej Pregelj (Ljubljana), Nikola Radic (Zagreb), Tonica Valla (Zagreb)
Local Organizers
Sándor Bohátka (chairman), István Berecz, István Futó, István Gál, László Kövér, Gábor Langer, Erzsébet Mikó, Margó Nagy, Vera Szedõ
7th JOINT VACUUM CONFERENCE
May 2629
Debrecen, Hungary
Aim and Scope of the Conference
The conference is the 7th in the series of the events which started in 1979, Gyõr (Hungary). First it was organised by the Austrian and Hungarian societies. The bilateral co-operation has been broadened and now the Joint Vacuum Conferences are organised triennially by Austria, Croatia, Hungary and Slovenia in the years between the European Vacuum Conferences and International Vacuum Congresses. Each of the Joint Conferences has to satisfy the unwritten rules set by the founders of this series keeping high scientific standard and preserving the friendly atmosphere of a small, active community. The organisers of the JVCs have traditionally good contacts with the neighbouring countries and the scientists from the Czech Republic, Poland, Slovak Republic and other countries have always given substantial contribution to the success of our conferences. The colleagues of our region are open to the international scientific community and internationally recognised scientists are regularly invited.
Topics of the scientific activity
Applied Surface Science - ASS
Electronic Materials - EM
Nanometer Structures - NS
Surface Science - SS
Plasma Science and Technique - PST
Thin Films - TF
Vacuum Metallurgy -VM
Vacuum Science - VS
The topics cover broad ranges of scientific activities in each field, e.g. Vacuum Science involves the production and measurement of vacuum as well as mass spectrometry.
IUVSTA Highlights Seminars
The IUVSTA Executive Council holds its 78th meeting in Debrecen at the weekend preceding the conference. The representatives of the scientific divisions of IUVSTA give an account on the latest developments in their fields. IUVSTA Highlights Seminars are held in a plenary session on the first day of the conference.
Admittance to the IUVSTA HS is free for the participants of IUVSTA ECM-78.
Language
The official language of the conference is English.
Location
Kossuth L. University, Debrecen,
Egyetem sq. 1
(May 26, Monday, 8.3013.30)
Debrecen Regional Center
of the Hungarian Academy of Sci., (DAB),
Debrecen, Thomas Mann str. 49
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Time Table |
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May 26, Monday |
May 27, Tuesday |
May 28, Wednesday |
May 29, Thursday |
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| 8.30 | OPENING | PLENARY | PLENARY | PLENARY | |||||||
| HIGHLIGHTS SEM. | 9.00 | R. Reid | 9.00 | U. Valbusa | 9.00 | Y. Achiba | |||||
| 9.00 | D.E. Sykes ASS | TF + EM | VS | SS | TF + VM | ASS + SS | EM | ||||
| 9.30 | G.E. McGuire EM | 9.50 | Pivac | Nemanic | 9.50 | Aumayr | Barna | 9.50 | Pervan | Desnica | |
| 10.00 | J. Murday NS | 10.20 | Tvarozek | Setina | 10.20 | Winkler | Mitterer | 10.20 | Sancrotti | Pászti | |
| 10.30 | G.G. Lister PST | 10.50 | Break | 10.50 | Break | 10.50 | Break | ||||
| 11.00 | J.H. Weaver SS | 11.10 | Makaró | Lamprecht | 11.10 | Beutl | Colligon | 11.10 | Biró | Korosak | |
| 11.30 | Break | 11.30 | Kovács | Hárs | 11.30 | Berkó | Hovorka | 11.30 | Simon | Dávid | |
| 12.00 | R.P. Howson TF | 11.50 | Szörényi | Schwarzinger | 11.50 | Tóth | Radic | 11.50 | Dolezal | Khanh | |
| 12.30 | A. Korhonen VM | 12.10 | Evtukh | Drobnic | 12.10 | Gross | Tomov | 12.10 | Heszler | Molnár | |
| 13.00 | R. Childs VS | 12.30 | Break | 12.30 | Pogrebnjak | Radi | 12.30 | Sárkány | Petõ | ||
| 13.30 | Closing Remarks | 13.00 | Lunch | 13.00 | Lunch | 13.00 | CLOSING | ||||
| Lunch | 14.00 | EXCURSION | NS+ASS+TF | PST | Lunch | ||||||
| ASS | VM + VS | to Hortobágy | 14.30 | Langer | | ||||||
| 15.00 | Jablonski | Presern | 15.00 | Verhoeven | Musil | ||||||
| 15.30 | Brandl | Czél | 16.00 | Puszta Show | 15.30 | Break | |||||
| 15.50 | Kövér | Ivan | 16.00 | Zalar | Leipner | ||||||
| 16.10 | Betz | | 16.20 | Menyhárd | Szikora | ||||||
| 16.30 | Theuerkauf | | 16.40 | Czigány | Mozetic | ||||||
| 16.50 | Break | 17.00 | Break | ||||||||
| 17.00 | POSTER SESSION | 17.20 | POSTER SESSION | ||||||||
| 19.00 | Concert | 19.00 | Banquet | 19.00 | ROUND-TABLE DISC. | ||||||
| 20.15 | Dinner | 20.15 | Dinner | ||||||||
Scientific programme
The scientific programme covers plenary and invited lectures as well as oral and poster contributions. IUVSTA highlights seminars are part of the scientific programme. Round-table discussion is organized to discuss questions from the participants.
MONDAY,
May 26
8.30 OPENING (Kossuth L.
University, Aula, 2nd floor)
D. Berényi, Welcome
J. Hevessy, mayor of Debrecen
J. Gyulai, president of the Hungarian National Committee of IUVSTA
J. Robins, president of IUVSTA
IUVSTA HIGHLIGHTS SEMINARS (Kossuth L. University, Aula, 2nd floor)
9.00 D.E. Sykes (Loughborough,
UK) - ASS
Recent Developments in Surface Chemical Analysis
9.30 G.E. McGuire (Research
Triangle Park, NC, USA) - EM
Fabrication and Characterization Limits in Advanced CMOS Technology
10.00 J. Murday (Washington,
USA) - NS
NANO: Science Beginning to Emerge as Technology
10.30 G.G. Lister (Hayes
Middlesex, UK) - PST
Opportunities and Advances in Plasma Science
11.00 J.H. Weaver (Minneapolis,
MN, USA) - SS
STM Visualization of Semiconductor Etching
11.30 Break
12.00 R.P. Howson (Loughborough,
UK) - TF
The use of plasmas in PVD processes
12.30 A. Korhonen (Helsinki,
Finland) - VM
Recent Advances in Plasma-Based Hard and Superhard Coatings
13.00 R. Childs (Cambridge,
MA, USA) - VS
Title unknown
13.30 Closing Remarks
Lunch
PARALLEL SESSION ASS
The main body of the conference programme takes place in the Headquarters of the Debrecen Regional Center of the Hung. Acad. Sciences (DAB), Debrecen, Thomas Mann str. 49
INVITED LECTURE
15.00 Jablonski, A.
Monte Carlo simulations of electron transport in quantitative AES and XPS
ORAL PRESENTATIONS
15.30 Brandl, K.W., Theuerkauf,
D., Milanovic, L., Störi, H.
Maxmind-management and exchange of method independent data for multi-method
surface analysis
15.50 Kövér, L.,
Kovács, Zs., Weightman, P., Sanjinés, R., Varga, D., Margaritondo,
G.,
Pálinkás, J., Abon, M.
Charge transfer in binary Cu-noble metal alloys
16.10 Betz, G., Husinsky,
W., Dandachi, C.
Cluster emission in sputtering
16.30 Schmölz, P.J.M., Theuerkauf,
D., Brandl, K.W., Störi, H.
Peak extraction and internal calibration for quantitative Auger electron
spectroscopy
16.50 Break
PARALLEL SESSION VM + VS
INVITED LECTURE
15.00 Presern,V.
Advanced vacuum technologies at steel production
ORAL PRESENTATIONS
15.30 Czél, Gy., Janovszky,
D., Kaptay, Gy., Bolyán, L.
The effect of nickel on liquid phase sintering of the tungstencopper system
15.50 Ivan, J., Dubracova,
V.
Thin wire as a medium vacuum explorer
17.00 POSTER SESSION I
P.1 Cortona, A., Schmidt, V., Husinsky,
W., Betz, G. (ASS)
Sputtering of excited Ni atoms
P.2 Siber, A., Gumhalter,
B. (ASS)
Debye-Waller factor in He --> Cu(001) collisions: the role of the interaction
potentials
P.3 Daróczi, Cs.,
Dóra, Gy., Homonnay, Z., Idzikowski, B., Horváth, Zs. (ASS)
STM topological investigations on annealed and boron implanted Fe80Mo7B12Cu1
amorphous ribbons
P.4 Hlavathy, Z., Tétényi,
P. (ASS)
Effect of hydrogen on the C1-C2 hydrocarbon adlayer on Pt as studied by
work function change and Auger electron spectroscopy
P.5 Tõkési, K., Varga,
D., Kövér, L. (ASS)
Surface effects on the inelastic mean free path of electrons in the energy
region 20 eV 5 keV
P.6 Gervasini, G., Cepek, C., Magnano,
E., Sancrotti, M., Bonizzoni, G. (ASS, PST)
Multi-technique evaluation of Batman and F82H martensitic
steels for fusion reactors
P.7 Cepek, C., Magnano, E., Vandre,
S., Goldoni, A., Laine, A.D., Curro, G.M., Santaniello, A., Sancrotti,
M. (NS, SS)
The electronic structure of the C60/Ag(110) and /Ag(001)
interfaces explored via ultra-high brightness synchrotron radiation
P.8 Vandre, S., Goldoni, A., Dhanak,
V.R., Santoni, A., Sancrotti, M. (SS)
High-temperature evolution of the Si(111) surface investigated by means
of synchrotron radiation
P.9 Petrik, P., Polgár,
O., Lohner, T., Fried, M., Khánh, N.Q., Gyulai, J. (ASS,TF)
Ion implantation-caused damage depth profiles in single-crystalline silicon
studied by spectroscopic ellipsometry and Rutherford Backscattering Spectrometry
P.10 Pavlovic, M., Desnica,
U.V. (EM)
Improvement in semi-insulating GaAs material quality through a decade
a comparative study of defects with deep levels
P.11 Riesz, F., Dobos, L., Karányi,
J. Dávid, L. (EM)
A combined in-situ scanning electron microscopic and mass spectrometric
study of the thermal decomposition of InP
P.12 Kovács, B., Dobos,
L., Mojzes, I., Schuszter, M., Dávid, L. (EM)
Pattern formation on the surface of heat treated matallizations of compound
semiconductors
P.13 Manuaba, A., Pászti,
F., Ortega, C., Grosman, A., Battistig, G. (EM)
Grazing irradiation of porous silicon by 500 keV He ions
P.14 Somogyi, K., Mimila-Arroyo,
J. (EM)
Aqueous sulphur passivation effect on the GaAs based photosensitive elements
P.15 Somogyi, K., Sáfrán,
G. (EM)
On the mechanism of the electric conductivity of vacuum deposited Ag2Se
thin layers
P.16 Somogyi, K., Theys,
B., Rommeluere, J- F., Varga, Sz., Sveshnikov, A.V.,
Chevallier, J. (EM)
Effect of the hydrogen plasma treatment in germanium doped n-GaAs
P.17 Pászti, Z., Petõ,
G., Horváth, Z.E., Karacs, A., Guczi, L. (NS)
Electronic structure of Ag nanoparticles deposited on Si(100)
P.18 Imre, A., Fedor, V.,
Kiss-Varga, M., Mishak, A., Shipljak, M. (NS)
Photostructural transformations in amorphous chalcogenide nanolayered films
produced by thermal vapour deposition
P.19 Beer, T., Laimer, J.,
Störi, H. (PST)
Study of the development of a pulsed DC glow-discharge used for plasma-
CVD with an ultrafast videosystem
P.20 Legrand, J.-C., Diamy, A.-M.,
Hrach, R., Hrachová, V. (PST)
A study of reaction mechanisms of methane decomposition in nitrogen afterglow
plasma
P.21 Hrach, R., Horváth,
M., Entlicher, M. (PST)
The Monte Carlo simulation of processes in positive column of DC glow discharge
in Ar with increased efficiency
P.22 Veibel, E., Takács,
E., Vámosi, J., Biri, S., Suta, T., Koncz, Cs., Raics, P. (PST)
Plasma diagnostics measurements on the new ECR heavy ion source of ATOMKI
P.23 Posadowski, W.M., Brudnik,
A. (PST)
Reactive magnetron sputtering of TiNx using high target
power density source
P.24 Hascík, S., Mozolová,
Z., Lalinsky, T., Kuzmík, J., Burian, E., Pogany, D., Matay, L.
(PST)
The properties of new GaAs power sensor microsystem (PSM) topology design
P.25 Huran, J., Hotovy, I., Hascík,
S., Kobzev, A.P. (PST)
Structural studies of PECVD SiC thin films modified by pulsed electron
and ion beams
P.26 Hascík, S., Hotovy,
I. (PST, TF)
Reactive magnetron deposition of NiO thin films with flow modulation of
oxygen
P.27 Hotovy, I., Huran, J., Hascík,
S., Lalinsky, T. (PST, TF)
Reactively sputtered NbN Schottky contacts on GaAs and their thermal stability
P.28 Laimer, J., Pauser, H., Schwaerzler,
C.G., Störi, H. (PST, TF)
On the diamond deposition in a supersonic DC plasmajet at pressures in
the mbar range
P.29 Pölzl, H., Strohmeier,
G., Eibl, C., Winkler, A. (SS)
Quantitative determination of the sticking coefficient of atomic hydrogen
on metal
surfaces
P.30 Eisenmenger-Sittner, C.,
Bangert, H., Bergauer, A., Seydewitz, F. (TF)
Percolation phenomena in sputter deposited aluminium tin films
P.31 Zorc, H., Janicki, V.,
Persin, A. (TF)
A quest for convenient procedures in designing of narrow band reflector
coatings
P.32 Cibulka, V., Vlcek,
J., Benda, M., Cerstvy, R., Kubásek, M., Musil, J. (TF)
Characterization of surface layers by glow discharge optical emission spectroscopy
P.33 Xia, C., Harju, E., Korhonen
, A.S., Adamik, M., Lábár, J.L., Barna, P.B. (TF)
Structure investigations of wear inhibiting layers on PVD TiN protective
coatings
P.34 Nemcsics, Á.
(TF)
Morphological investigation on electrochemical etched GaAs surface
P.35 Rau, S. (TF)
HTcS thin films excimer laser ablated in reactive vacuum on LaAlO3
P.36 Senderak, R., Jergel,
M., Luby, S., Majkova, E., Spasova, M., Brunel, M., D'Anna, E., Luches,
A., Martino, M. (TF)
Study of granular Ag-Co films irradiated by excimer laser
P.37 Mandrino, D., Marinkovic,
V., Prodan, A. (TF)
Au growth on (0001) faces of SnS2 and SnSe2
P.38 Radic, N., Ivkov, J.,Tonejc,
A., Car, T. (VM)
Thermal stability of amorphous Al-W alloys
P.39 Drab, M., Novak, J.,
Pregelj, A. (VM)
Welds on stainless steel realized by nitrogen protecting
P.40 Godec, M., Jenko, M.,
Mast, R., Grabke, H.J., Viefhaus, H., Vodopivec, F. (VM)
Sn influence on the recrystallization of non-oriented electrical steel
P.41 Godec, M., Jenko, M.,
Mast, R., Grabke, H.J., Viefhaus, H., Kosec, L. (VM)
Tin segregation and the influence on the recrystallization of FeSi alloy
P.42 Jenko, M., Godec, M.,
Vodopivec, F., Mast, R., Grabke, H.J. (VM)
Surface and grain boundary segregation of Sb and Sn - effects on silicon
steel properties
P.43 Steiner Petrovic, D.,
Jenko, M., Grabke, H.J. (VM)
Oxidation of vacuum melted non-oriented electrical steel during decarburization
annealing
P.44 Vértes, M. (VS)
Cleaning of parts for UHV physical equipments
P.45 Niewinski, M., Szwemin,
P.J. (VS)
New version of the CCVS program for calculation a conductance of composite
vacuum systems using Monte-Carlo
P.46 Szwemin, P.J., Szymanski,
K. (VS)
Distribution of the gas density and gas flux in calibration chambers
P.47 Siricova, A. (VS)
Measuring of very small gas flow under condition of molecular flow
P.48 Drab, M., Novak, J.,
Pregelj, A., Gasperic, J., Tavzelj, M. (VS)
Optimization of small stainless steel diffusion pump
P.49 Gasperic, J. (VS)
The correct operation of high vacuum pumping systems
P.50 Novak, J., Pregelj,
A., Drab, M., Tavzelj, M. (VS)
Development of low-cost vacuum switch
P.51 Zgajnar, I., Drab, M.,
Pregelj, A., Juzina, L. (VS)
Vacuum switch with miniature Si diaphragm
P.52 Morvay, L., Kubík,
I. (VS, PST)
Investigation of the equilibrium conditions in vacuum discharge plasmas
19.00 Concert Nagyerdei Church,
Debrecen, Bolyai str. 25
20.15 Dinner Hotel Postás, Debrecen, Nagyerdei krt. 66
TUESDAY,
May 27
PLENARY LECTURE
9.00 R. Reid (Daresbury,
UK):
Quality issues in vacuum
PARALLEL SESSION TF + EM
INVITED LECTURES
9.50 Pivac, B.
Structure and defects in thin silicon oxynitride films
10.20 Tvarozek, V.
Thin films in biosensors
10.50 Break
ORAL PRESENTATIONS
11.10 Makaró, Zs.,
Dücsõ Cs., Battistig, G., Horváth, Zs., Likonen, J.,
Bársony, I.
Backside aluminization effects on solar cell performance
11.30 Kovács, I.,
Tisserand, S., Flory, F., Lábár, J.L., Sulyok, A., Adamik,
M.
Structure analysis of Ti implanter SiO2 and Ta2O5
optical coatings
11.50 Szörényi,T.,
Geretovszky, Zs., Tóth, J., Simon, A., Kiss, Á.Z., Cserháti,
Cs.
Laser direct writing of tin oxide patterns
12.10 Evtukh, A.A., Kaganovich,
E.B., Litovchenko, V.G., Marchenko, R.U., Svechnikov, S.V., Manoilov, E.G.
Laser modification of silicon surface for field emission structures
PARALLEL SESSION VS
INVITED LECTURES
9.50 Nemanic, V.
Outgassing of H2 from thin wall stainless steel chamber
10.20 Setina, J.
Organization of vacuum metrology in Slovenia
10.50 Break
ORAL PRESENTATIONS
11.10 Lamprecht, R.
The philosophy of "dry" and "really dry" high vacuum
pumping systems
11.30 Hárs, Gy., Tass,
Z.
Application of quadrupole ion trap for the accurate mass determination
of submicron size charged particles
11.50 Schwarzinger, G.W.,
Dobrozemsky, R., Poschenrieder, W., Langer, U.
Vector mass spectrometry at ASDEX Upgrade: recent developments and current
status
12.10 Drobnic, M., Mozetic,
M., Gams, M.
Use of artificial intelligence techniques for catalytic probe modelling
13.00 Lunch
14.00 Excursion to Hortobágy and Conference Banquet
WEDNESDAY,
May 28
PLENARY LECTURE
9.00 U. Valbusa (Genoa, It):
Adsorption, desorption and dissociation: the case of O2
on Ag
PARALLEL SESSION SS
INVITED LECTURES
9.50 Aumayr, F.
Impact of highly charged ions on surfaces
10.20 Winkler, A.
Laser spectroscopy on surface reaction products
10.50 Break
ORAL PRESENTATIONS
11.10 Beutl, M., Rendulic,
K.D.
The role of rotational energy in precursor adsorption
11.30 Berkó, A., Ulrych,
I., Prince, K., Solymosi, F.
Encapsulation of Rh-nanoparticles supported on TiO2(110)-(1X1)
surface: XPS and STM studies
11.50 Tóth, J., Varga,
D., Kövér, L., Gruzza, B., Zeze, D., Jardin, C., Gergely, G.
Resolution correction in EELS
12.10 Gross, H., Anbauer,
A., Boh, J., Eilmsteiner, G., Winkler, A.
Kinetics and dynamics of the Eley-Rideal reaction of hydrogen on aluminum(100)
12.30 Pogrebnjak, A.D., Lavrentiev,
V.I.
Simultaneous deposition of coverings and high-dose ion implantation on
metal surface
PARALLEL SESSION TF + VM
INVITED LECTURES
9.50 Barna, P.B., Adamik,
M.
Modification of polycrystalline film structures by additives
10.20 Mitterer, C., Losbichler,
P., Gibson, P.N., Gissler, W. Hofer, F., Warbichler, F.
Nanocrystalline hard coatings within the quasi-binary system TiN-TiB2
10.50 Break
ORAL PRESENTATIONS
11.10 Colligon, J.S., Valizadeh,
R., Bachurin, V. S.
Recent developments in hard coatings produced by ion-assisted deposition
11.30 Hovorka, D., Misina,
M., Bell, A.J., Studnicka, V., Musil, J.
Magnetron sputtered nanocrystalline titanium carbide films
11.50 Radiæ, N.,
Tonejc, N.
Disordered tungsten-carbon alloys produced by reactive magnetron sputtering
12.10 Tomov, I., Adamik,
M., Barna, P.B.
Texture characterization of Al/Ti stratified thin films by X-ray diffraction
12.30 Radi, Zs., Barna, P.B.
The influence of diffusion mechanisms on phase formation in Al-Pt thin
film system
13.00 Lunch
PARALLEL SESSION NS + ASS + TF (multilayers)
INVITED LECTURES
14.30 Beke, D., Langer, G.A.,
Kis-Varga, M., Dudás, A., Nemes, P., Daróczi, L., Kerekes,
Gy., Erdélyi, Z.
Thermal stability of amorphous and crystalline multilayers produced by
magnetron
sputtering
15.00 Verhoeven, J., Cilia,
M.
The application of energetic ions to modify short period (nm range) multilayer
systems
15.30 Break
ORAL PRESENTATIONS
16.00 Zalar, A., Jagielski,
J., Mozetic, M., Pracek, B., Panjan, P.
Characterization of NiAl layers formed with 350 keV Ar+ ion
mixing of Ni/Al multilayer structures
16.20 Sulyok, A., Menyhard, M.
Auger depth profiling at elevated temperature
16.40 Czigány, Zs.,
Sjöström, H., Hultman, L., Radnóczi, G.
Structure and hardness of Ag/Cu and Ag/Al polycrystalline multilayers
PARALLEL SESSION PST
INVITED LECTURES
14.30
15.00 Musil, J.
Low-pressure magnetron sputtering
15.30 Break
ORAL PRESENTATIONS
16.00 Musil, J., Leipner, I.,
Vlcek, J.,
Round magnetron with grooved target
16.20 Szikora, B.
Background of the titanium nitride deposition
16.40 Mozetic, M., Drobnic,
M., Pregelj, A.
Determination of atomic hydrogen density along a continuously pumped glass
tube
17.00 Break
17.20 POSTER SESSION II
P.53 Bene, R., Kiss, G.,
Perczel, I.V., Meyer, F.A., Réti, F. (ASS)
Experiments with an MS-coupled DC sensor-tester
P.54 Sárkány, J.
(ASS)
Complex effect of water on the FTIR spectra of zeolite Na/ZSM-5
P.55 Sárkány, J.
(ASS)
Partial reduction of over-ionexchanged, calcined CuII/ZSM-5 by carbon monoxide
an FTIR study
P.56 Sárkány, J.
(ASS)
Effect of water on Cu+/ZSM-5 produced by outgassing of over-ionexchanged
CuII/ZSM-5 an FTIR study
P.57 Papajová, D.,
Vesely, M. (ASS)
Model of the RHEED intensity oscillations based on the reflectivity of
the MBE grown surface
P.58 Lohner, T., Petrik,
P., Polgár, O., Khánh, N.Q., Fried, M., Gyulai, J. (ASS,
TF)
Ion implantation induced buried disorder studied by Rutherford backscattering
spectrometry and spectroscopic ellipsometry
P.59 Lugomer, S., Maksimovic,
A. (ASS, SS)
Laser generated solitons-on-vortex-filaments on Ta surface
P.60 Horváth, Zs.J.,
Ádám, M., Pintér, I., Cvikl, B., Korosak, D., Mrdjen,
T., Tuyen, V.V., Makaró, Zs., Dücsõ, Cs., Bársony,
I. (EM)
Anomalous temperature dependence of series resistance in Ag/Si and Al/Si
Schottky junctions
P.61 Subrahmanyam, A., Balasubramanian,
N., Manivannan, P., Horváth, Zs.J., Tuyen, V.V., Riesz, F.,
Rácz, M. (EM)
Electrical characteristics of ITO/InP heterostructures
P.62 Hahn, E., Lepsényi,
I., Kovács, B., Fülöp, S. (EM)
Anisotropic etching of single-crystal silicon and producing field-emitting
silicon tips
P.63 Põdör,
B., Reményi, G., Kovács, Gy., Savel'ev, I.G., Gombos,
G., Novikov, S.V. (EM)
Quantum transport effect in two-dimensional electron gas in InGaAs/InP
heterostructures
P.64 Põdör,
B., Reményi, G., Kovács, Gy., Savel'ev, I.G., Novikov,
S.V. (EM)
Activated transport in the magnetic-field induced insulating phase in two-dimensional
electron gas in InGaAs/InP heterostructures
P.65 Pintér, I., Pászti,
F., Manuaba, A. (EM, PST)
Direct and remote N2-plasma immersion ion implantation
P.66 Gracin, D., Dubcek,
P. (EM, TF)
Microstructural properties of a-Si1-xCx:H
by SAXS and IR spectroscopy
P.67 Sáfrán, G.,
Geszti, O., Radnóczi, G., Malicskó, L. (EM, TF)
The role of polymorphic phase transition in the formation of (001) oriented
Ag2Se films on amorphous and crystalline substrates
P.68 Dücsõ,
Cs., Khanh, N.Q., Ádám, M., Lohner, T., Fried, M., Bársony,
I. (EM, NS)
Chemical vapor deposition of silicon nitride into porous silicon
P.69 Koller, L., Vrhovec,
S., Pozun, K., Railic, D. (EM, VS)
Characterisation of vacuum outgassed plastic materials for miniature relays
P.70 Schwaerzler, C.G., Laime,
J., Störi, H. (PST)
Influence of oxygen addition on plasma for diamond deposition
P.71 Vorlaufer, G., Laimer,
J., Störi, H. (PST)
Determination of plasma temperature by measuring the Doppler broadening
of emitted spectral lines
P.72 Pavlík, J., Novák,
S,. Hrach, R., Hedbávny, P., St'ovicek, P., (PST)
Technological and measuring system for the study of plasma oxidation of
aluminium thin films
P.73 Mozetic, T. (PST)
Plasma ashing of biological samples
P.74 Denbnovetsky, S.V., Melnik,
V.I., Melnik, I.V. (PST)
Application of high-voltage glow discharge electron guns with anode plasma
in electron-beam technology
P.75 Kántor, Z., Szörényi,
T. (PST, TF)
Numerical calculation of pulsed laser deposited film profiles
P.76 Mozetic, M., Zalar,
A., Bogataj, T., Arcon, I., Preseren, R. (PST, TF)
Comparison of AES and EXAFS analysis of a thin CuxAly
layer on Al substrate
P.77 Riedel, M., Düsterhöft,
H. (SS)
Secondary H+ ion emission and hydrogen outgassing of
metals studied by SIMS
P.78 Varga, G. (SS)
Calculation of diffraction peak intensities of thermal energy atomic scattering
from solid surfaces by time dependent Schrödinger equation
P.79 Varga, G. (SS)
Determination of Debye-Waller factors from elastic diffraction peaks of
thermal energy atomic scattering from solid surfaces
P.80 Varga, G. (SS)
Determination of intensity distribution of thermal energy atom scattering
from disordered solid surface by time dependent Schrödinger equation
P.81 Varga, G. (SS)
Analysis of classical chaotic elastic atomsurface scattering by quantum
mechanical model
P.82 Ivanko, J., Almeida,
J., Coluzza, C., Zwick, F., Margaritondo, G. (SS,TF)
Schottky barrier height dependence on the silicon intralayer thickness
of Au/Si/n-GaAs Schottky contacts
P.83 Sklenka, W., Bergauer, A.,
Bangert, H., Eisenmenger-Sittner, Ch., Bauer, W. (TF)
Investigation of resputtering effects in the Al-Zn-system: experiments
and Monte-Carlo simulation
P.84 Hrach, R., Novotny, D.,
Novák, S., Pavlík, J. (TF)
Analysis of methods for the study of semicontinuous and continuous metal
film
morphology
P.85 Soukup, Z., Rafaja,
D., Jezek, V., Musil, J. (TF)
Effect of Ti interlayer and bias on structure and properties of TiN films
P.86 Pozun, K., Koller, L.,
Remskar, M., Irmancnik B. (TF)
Pt thin film deposition on polymer substrate
P.87 Chornous, A., Protsenko,
S., Shovkoplyas, O. (TF)
The investigation of electrophysical properties of double-layer films Cu/Cr,
Ni/Co, Co/Cr and Ni/Ti
P.88 Dmitruk, N.L., Borkovskaya,
O.Yu., Fursenko, O.V. (TF)
Optical and electronic characterization of transition layer in thin film
Au-GaAs Schottky barrier
P.89 Dmitruk, N.L., Gorea, O.S.,
Mikhailik, T.A., Romaniuk, V.R., Zabashta, L.A. (TF)
Multiple-angle-of-incidence ellipsometry for GaAs/GaAs superlattices
P.90 Semikina, T.V., Shmyreva,
A.N., Semenovich, V,A. (TF)
Heterojunction photodetectors with diamondlike carbon films
P.91 Shmyreva, A.N., Dushejko, M.G.,
Scurtul, K.D., Semikina, T.V. (TF)
Polyfunctional properties of the doublecomposition films on the basis of
zinc oxide
P.92 Savchenko, N., Shchurova,
T., Trunov, M., Baran, N., Sharkany, J. (TF)
Periodic structures based on topological structural transition
P.93 Shmyreva, A.N., Dushejko,
M.G., Skurtul, K.D. (TF)
Thermoelectrical properties of the cerium dioxide semiconductor films
P.94 Radnóczi, G.,
di Forte-Poisson, M.A., Papaioannou, V., Stoemenos, J., Huhn, G., Tóth,
L., Pécz, B. (TF, EM)
Morphology of GaN layers grown on sapphire substrate by MOCVD
P.95 Erjavec, B. (VS)
Accuracy of Penning gauge measurements in UHV
P.96 Balogh, K. (VS)
On use of SAES ST 707 strips for reduction of background lines in a noble
gas mass spectrometer
P.97 Dabek, J., Michalak,
L., Pelc, A. (VS)
The double-focusing sector field mass spectrometer for investigations of
gaseous clusters
P.98 Markowski, A., Michalak,
L., Adamczyk, B. (VS)
Generation of ions on the crossing of the electron or the photon beam with
an effusion molecular beam
P.99 Ristoiu, D., Cosma, C., Voros,
A., Ristoiu, T. (VS)
Quadrupole mass spectrometer coupled with a membrane inlet system
P.100 Orsnes, H., Bohátka,
S., Degn, H. (VS)
Dissociation of water at hot filament in membrane inlet mass spectrometer
P.101 Krc-Turba, J. (VS)
Metrological assurance of partial pressure at vacuum range
P.102 Pregelj, A., Drab,
M., Grasic, I., Mozetic, M., Paulin, A. (VS)
Studies for optimization of cold cathode Penning gauge
P.103 Pregelj, A., Drab,
M., Juzina, L., Paulin, A., Mozetic, M. (VS)
Field emission electron source experiments
P.104 Lindenmájer, J.,
Hegman, N., Mészáros, S., Vad, K., Langer, G., Csík,
A. (TF)
RF susceptibility of YBaCuO sputtered films
19.00 ROUND-TABLE DISCUSSION
A round-table discussion will be held on topics, which are most sought for by the participants. Hints and proposals have been collected in the Abstract Forms, however, participants are encouraged to put further suggestions.
20.15 Dinner
THURSDAY,
May 29
PLENARY LECTURE
9.00 Y. Achiba (Tokyo, Jp)
Fullerene cage formation and atom encapsulation
PARALLEL SESSION ASS + SS
INVITED LECTURES
9.50 Pervan P., Valla, T.,
Milun, M.
Structural and electronic properties of ultra-thin vanadium films on Cu(100)
10.20 Vandre, S., Magnano, E., Günther,
S., Kolmakov, A., Kovac, J., Marsi, M., Kiskinova, M., Sancrotti, M.
The thermally-agglomerated noble-metal/Si(111) interfaces studied by
means of synchrotron radiation-based spectromicroscopy
10.50 Break
ORAL PRESENTATIONS
11.10 Biró, L.P.,
Gyulai, J., Havancsák, K.
Scanning probe method investigation of nanometer structures produced by
irradiation with 200 MeV ions
11.30 Simon, A., Pászti,
F., Uzonyi, I., Manuaba, A., Kiss, Á.Z., Dücsõ, Cs.
Effect of surface morphology on scanning RBS microbeam measurements
11.50 Dolezal, M.C., Athenstaedt,
W., Leisch, M.
Atom probe study of the segregation behaviour of molybdenum-rhenium alloys
12.10 Mechler, Á., Heszler,
P., Reimann, C.T., Révész, K., Bor, Z.
Cantilever flexure, adhesive/attractive and frictive force measurements
on highly-oriented pyrolytic graphite by Scanning Force Microscopy
12.30 Sárkány,
J.
A comparative FTIR study on the effect of counterion on the framework vibrational
spectra of zeolite ZSM-5
PARALLEL SESSION EM
INVITED LECTURES
9.50 Desnica, U.V.
Wide band-gap II-VI compounds can the efficient doping be achieved?
10.20 Pászti, Z.,
Szilágyi, E.
Pore structure investigations in porous silicon by ion beam analytical
methods
10.50 Break
ORAL PRESENTATIONS
11.10 Cvikl, B., Korosak, D.,
Horvath, Zs.J.
Comparative study of I-V characteristics of ICB deposited Ag/p-Si(100)
and Ag/n-Si(111) Schottky junctions
11.30 Dávid, L., Kovács,
B., Mojzes, I., Pécz, B., Lábár, J., Dobos, L.
Structural and electrical characterisation of Ni/Ge-nGaAs interface
11.50 Mohácsy, T., Khánh,
N.Q., Ádám, M., Gyulai, J.
Modified C-t technique for determining the generation lifetime profile
in MeV He+ implanted silicon
12.10 Molnár, K.,
Mohácsy, T., Varga, P., Bársony, I.
Metallized diffused porous-crystalline silicon LED structures
12.30 Petõ, G.,
Kanski, J., Molnár, G.L., Hua, Q.
Angular resolved photoemission studies of HoSi2 thin
film
13.00 CLOSING
Lunch
Exhibition
An exhibition takes place during the conference in the Headquartes of the Debrecen Regional Center of the Hungarian Academy of Sciences, DAB, (Debrecen, Thomas Mann str. 49).
Exhibitors
ALCATEL Hochvakuum Technik GmbH, Germany
CABURN-MDC Ltd., UK
EDWARDS Hochvakuum GmbH, Germany
LEYBOLD Vakuum GmbH, Germany
KONTRADE+ Kft., Hungary
PFEIFFER Vacuum Austria GmbH, Austria
VACOM GmbH, Germany
VARIAN S.P.A., Italy
Social programmes
All the Participants and Accompanying Persons registered to JVC-7 are welcome to these programmes. Please have your badge on.
Get-together Party
May 25, Sunday 18.3020.00
Venue: Debrecen Regional Center of the Hung. Acad. of Sci. (DAB), Thomas Mann str. 49
Concert
May 26, Monday 19.0020.00
Venue: Nagyerdei Church (Bolyai str. 25) just neighbouring the place of the conference, DAB
Programme: Choir of the Reformed
College Debrecen, conducted by Sándor Berkesi,
Organ
music by Dezsõ Karasszon
Excursion to Hortobágy and Conference Banquet
May 27, Tuesday
Tentative programme
14.00 Departure from Kossuth L. University (Debrecen, Egyetem sq. 1), by buses
15.00 Visiting local museums (arts, folklor, flora and fauna)
16.00 Puszta show couching in the puszta
18.00 Walking in the village Hortobágy
19.00 Banquet in Hortobágy Csárda
Sightseeing tours
Other sightseeing tours and excursions are offered by the tourist service on separate sheets and on location of the conference.
General information
Venue
The Debrecen Regional Center of the Hungarian Academy of Sciences (DAB, Debrecen, Thomas Mann str. 49) in the northern part of Debrecen will provide the facilities for the Conference and Exhibition. This quiet place ensures optimal conditions for information exchange.
Debrecen is 224 km east of Budapest, in the middle of the Great Hungarian Plain, on the border of Hortobágy, the Magyar Puszta, which is the biggest National Park of Hungary and famous for its special fauna and flora. Debrecen is the second largest city in the country and the economic, educational and artistic centre of Eastern Hungary, with a rich and unique cultural and religious history. It is abundant in thermal water. In the surroundings of Debrecen many precious pieces of the traditional architecture, folk-art and workshops of craftsmanship can be found, and this area is not far from the famous wine cellars of Tokaj and Eger.
Registration
Registration Desk and Conference Office
The Registration Desk of JVC-7
| May 25, Sunday | 16.0020.00 | Hdq. of Debrecen Reg. Center of Hung. Acad. Sci. (DAB) Debrecen, Thomas Mann str. 49 |
| May 26, Monday | 8.00 13.00 | Kossuth L. University (KLTE) Debrecen, Egyetem sq. 1 |
| 15.0019.00 | Hdq. of Debrecen Reg. Center of Hung. Acad. Sci. (DAB) | |
| Other days: during scientific activity, in DAB | ||
| Registration fee | before 14 Apr. | after 14 Apr. |
| participants: | 300 DEM | 380 DEM |
| students (document is required): | 180 DEM | 220 DEM |
| accompanying persons: | 160 DEM | 200 DEM |
The registration fee includes:
for active members: attendance
to the Conference and Exhibition, Conference Materials;
for active members and accompanying persons: lunch, coffee and refreshments
daily; Get-together Party; Conference Excursion and Banquet.
Oral and poster contributions
Oral
After plenary lectures (45 min each) and invited lectures (30 min each) oral presentations (20 min each) are organised in parallel sessions.
Overhead projectors and slide projectors (5cm x 5cm) will be provided.
Poster
There are two sections of poster presentations, posters of each topic are evenly arranged in both sections. All posters are displayed for one day and a half to allow detailed discussions. Posters should be fixed on Monday between 8.0015.00 (Poster session I, P.1P.52) and on Wednesday between 8.0011.00 (Poster Session II, P.53P.104). The posters will be displayed until Tuesday 13.00 and Thursday 13.00, respectively.
Please note that identification numbers differ from the tentative registration numbers.
Poster area: width: 120 cm; height: 130 cm.
Proceedings
The Proceedings as Selected Papers of the Conference including the plenary and invited papers and some selected oral/poster contributions will be published in the journal VACUUM. The available space in the special issue of the journal limits the number of selected papers, however it is a good opportunity to publish the papers in the well-known international scientific journal.
The contributions will be evaluated and advised for publication by the Guest Editors of the conference. The publication will be at no cost to the authors but please note that the Organisers do not order copies for the delegates. Obviously, each paper which is not published in the special issue can be submitted to the journal individually on its usual way and then it is reasonable to remark in the footnote that it was a contribution to the JVC-7. Authors submitting their papers to the Conference Office will be informed not long after the conference in order to help possible individual submissions.
Submission of papers to the Conference Office: May 26, 1997.
Extended Abstracts
Authors of all accepted papers were invited to submit camera-ready extended abstracts (max. 2 pages of A4 format) to the Conference Office to be received until April 30, 1997. Papers received later are not included into the booklet.
The A4 format is reduced to A5 format and printed by the organisers. The participants will get one copy of the Extended Abstracts with the conference materials.
Transportation
Travel by plane. The two airport terminals of Budapest-Ferihegy Airport are connected to Budapest downtown by a special airport coach. The city bus terminal is located in Erzsébet Square, and there is a Metro (subway) station nearby (Deák square station) which provides easy access on the blue line to Budapest Nyugati (Western) and on the red line to Budapest Keleti (Eastern) and Budapest Déli (Southern) Railway Stations. Alternatively, the Airport Minibus Service can be used directly between Ferihegy Airport and any destination in Budapest (fare in May, 1997: 1000 Ft/person). Regular bus service: red No. 93 to Railway- and Metro Station Kõbánya-Kispest to change for fast trains to Debrecen.
Travel by train. Trains from Vienna, Bratislava, Prague, Warsaw, Ljubljana, Zagreb and Belgrade arrive at Budapest Keleti railway station, trains from Moscow, Kiev and Bucharest arrive at Budapest Nyugati station.
InterCity trains are recommended to Debrecen. The trip takes 2 hrs 20 mins from Budapest Nyugati station. IC-trains depart from Budapest every three hours between 7.05 and 19.05 to Debrecen (from Debrecen to Budapest every three hours between 6.58 and 18.58). For the IC-trains a seat reservation is obligatory. Other trains are in almost every hours between 06.10 and 21.10 and travel time is about 33.3 hrs.
Direct train (Arrabona Express) from Vienna to Debrecen: d 16.07 a 22.40; from Debrecen to Vienna: d 7.14 a 14.00.
Travel by car. From Vienna (via Nickelsdorf (A)/Hegyeshalom (H)): on motorway No. 1 (M1) to Budapest (178 km). Toll: between Hegyeshalom and Gyõr (ca 2000 Ft), other motorways are toll-free.
Budapest-Debrecen:
a) First on motorway M3 (direction: Miskolc): 80 km to Gyöngyös, then on highway No. 3 (direction: Miskolc): 34 km to Füzesabony, and on highway No. 33 (direction: Debrecen): 118 km to Debrecen. Travel time: 2.53 hours depending on the traffic.
b) On highway No. 4 (direction: Debrecen): 224 km to Debrecen. Travel time: 2.53.5 hours depending on the traffic.
Speed limits: motorway: 120 km/h; highway, other roads: 80 km/h; in town: 50 km/h.
Local transportation. Tickets for local public transport have to be purchased in advance at the tobacconist, kiosks, ticket vending machines, etc. Note, that in Debrecen there are different tickets for tram (50 Ft) and for buses (60 Ft). A ticket is valid for one journey and must be validated at the ticket puncher inside the vehicle.
For your orientation in Debrecen, a schematic map is enclosed on the back cover.
Meals
Lunch is provided each day in the dining room of Kossuth L. University (Debrecen, Egyetem sq. 1). Dinner will be served in Hotel Postás (Debrecen, Nagyerdei krt. 66). Meals are offered only for Participants and Accompanying Persons registered for JVC-7. Please, hold your badge on.
Weather
In May, a mild daytime temperature around 1520 oC and somewhat cooler temperature at night are expected, with occasional rain or short showers. An umbrella and sweater are advised to have at hand.
Currencies
Hungarian currency is Forint (Ft, HUF). 1DEM = 102.6 Ft; 1 USD = 176.7 Ft (May 1, 1996).
You are advised to change money at official desks (hotel receptions, banks, tourist offices) only to a suitable amount. In many shops you may use your credit cards.
Telephone
Public telephones operate either with coins (of 10, 20 HUF) or with cards accessible at hotel receptions, tabacconists, etc..
For an international call, please dial 00 first, then after a tone, dial the prefix of the country you are calling, finally the area and local number. Hungary's code number for an international call from abroad is 36.
For an interurban call within Hungary, please dial 06 first, wait for another tone, then dial the area code number of the city (that is 52 for Debrecen), and accomplish dialing by the customer's local number.
Iportant addresses
All correspondence should be done to the JVC-7 Conference Office:
| Until May 23 | May 2529 |
| ATOMKI | Debrecen Regional Center of the H.A.S. (DAB) |
| Bem sq. 18/C | Thomas Mann str. 49 |
| H-4001 Debrecen, POB 51 | H-4032 Debrecen |
| Hungary | Hungary |
| Phone: (36)-52-417 266 | Phone: (36)-52-412 177 |
| Fax: (36)-52-416 181 | Fax: (36)-52-410 909 |
| E-mail: jvc-7@atomki.hu Web-site: www.atomki.hu/JVC-7/ | |
Map of Debrecen