Hungarian Academy of Sciences
Institute for Nuclear Research

Secondary neutral-particle/ion mass spectrometer (SNMS/SIMS)

Category Measuring system
Type Spect
Organizational unit
Person in charge
Üzembentartó MTA Atomki - Debreceni Egyetem
Application Research, Service
Value high value
Research topics
Abstract

The SNMS/SIMS-XPS assembly contains a secondary neutral mass spectrometer, a secondary ion mass spectrometer and an X-ray photoelectron spectrometer (XPS) with a common vacuum system. This arrangement enables the analysis of samples in ultra-high vacuum to be carried out without opening the vacuum chamber during the sample transfer. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution. n

 

Description

Rövid leírás

The SNMS/SIMS-XPS assembly contains a secondary neutral mass spectrometer, a secondary ion mass spectrometer and an X-ray photoelectron spectrometer (XPS) with a common vacuum system. This arrangement enables the analysis of samples in ultra-high vacuum to be carried out without opening the vacuum chamber during the sample transfer. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution.

Műszaki paraméterek

Plasma Ar, Ne, Kr, Xe
Sputtering speed ~0,1 nm/s
Ion energy 100 eV - 2 keV
Mass spectrometer Balzers QMG 422
Accessable mass region 0 - 340 amu
Sensitivity 1 ppm
Depth resolution 1-2 nm
Sample holder heatable upto 600 oC
  coolable upto -180 oC
  x - y scanning possibility