Hungarian Academy of Sciences
Institute for Nuclear Research

Spect photoelectron spectrometer (XPS)

Category Measuring system
Type Spect
Organizational unit
Person in charge
Üzembentartó MTA Atomki - Debreceni Egyetem
Application Research, Service
Value high value
Abstract

The Spect photoelectron spectrometer is a recently commissioned equipment at Atomki, which is equiped to the SNMS/SIMS mass spectrometer in a common vacuum system. This arrangement enables the analysis of solid-state samples in ultra-high vacuum carrying without opening the vacuum chamber. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution.

Description

The Spect photoelectron spectrometer is a recently commissioned equipment at Atomki, which is equiped to the SNMS/SIMS mass spectrometer in a common vacuum system. This arrangement enables the analysis of solid-state samples in ultra-high vacuum carrying without opening the vacuum chamber. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution.