Felületvizsgálat visszaszórt elektronok energiaveszteségi spektroszkópiával

Kompetencia terület Analysis of materials and surfaces
Módszer REELS
Kapcsolattartó
Szakmai leírás

In Reflection Electron Energy Loss Spectroscopy (REELS) the surface of a specimen is bombarded with a low energy (<10 keV) electron beam. As a results of excitation of the near surface region the electrons are scattered both elastically and inelastically, providing information on the structure of compounds at the surface. The scattered electrons are analysed by an electron spectrometer to get the energy distribution of the reflected electrons.

 

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